Substrate
· Standard chip size: 1.6×3.4×0.3 mm.
· Cross-section is trapezium-shape.
· High reflective chemically stable Au back side coating (reflectivity is 3 times better in comparison with uncoated probes).
· Compatible with the most of commercialAFM devices.
· The base silicon is highly doped to avoid electrostatic charges.
Cantilever
· Rectangular shape.
· Cross-section is trapezium-shape.
· Backside width is given in probes specifications.
· Available for contact, semicontact and noncontact modes.
· Tip is set on the controlled distance 5-20мm from the free cantilever end.
Tip
· Total tip shape is tetrahedral, the last 500nm from tip apex is cylindrical.
· Tip height: 14 – 16 мm.
· Typical curvature radius:
– of uncoated tips 6 nm, guaranteed 10nm;
– of coated tips 35nm.
· Tip offset: 5 – 20 мm.
· Tip aspect ratio: 3:1 – 7:1.
· Front plane angle: 10°±2°.
· Back plane angle: 30°±2°.
· Side angle (half): 18°±2°.
· Cone angle at the apex: 7° – 10°.

Side View Sketch

Front View Sketch

“Golden” Silicon Probes are available:
· with Au and Al reflective coating
· with PtIr, TiN, Au, diamond doped conductive coating
· with CoCr magnetic coating
· with no coatings (bare)
· tipless

Probes are packaged in GelPak® boxes. (GelPak® is a registered trade mark of Vichem
Corporation)

Guaranteed product yield is better than 90%.
Available cantilever bent angle

Warranty: 1 year for uncoated probes and probes with reflective coating
6 months for probes with conductive coating
3 months for probes with magnetic coating