Name: TGZ2
Price: 100.00 EUR
Availability: InStock

Description

Calibration grating TGZ2 is intended for Z-axis calibration (step height 110 ± 2 nm) and nonlinearity measurements.

* Step height is the average meaning based on the measurements of 5 gratings with the same height (from the batch of 300 gratings) by AFM calibrated wih help of PTB certified grating TGZ1. Basic step height can vary from the specified one within ±20 % depending on the batch (for example TGZ2 grating can have step height 95±2 nm).

AFM image of TGZ2 grating (step height 110nm).

Additional information

Structure

step – SiO2, bottom – Si

Pattern types

1- Dimensional (in Z-axis direction)

Step height

TGZ2 – 110±2 nm* * – the average meaning based on the measurements of 5 gratings with the same height (from the batch of 300 gratings) by AFM calibrated by PTB certified grating set TGS1. Basic step height can vary from the specified one within ±10 % depending on the batch (for example TGZ1 grating can have step height 22±1.5 nm)

Period

3±0,05 µm

Effective area

central square 3×3 mm

Structure	step – SiO2, bottom – Si
Pattern types	1- Dimensional (in Z-axis direction)
Step height	TGZ2 – 110±2 nm* * – the average meaning based on the measurements of 5 gratings with the same height (from the batch of 300 gratings) by AFM calibrated by PTB certified grating set TGS1. Basic step height can vary from the specified one within ±10 % depending on the batch (for example TGZ1 grating can have step height 22±1.5 nm)
Period	3±0,05 µm
Chip size	5x5x0,5 mm
Effective area	central square 3×3 mm